Diffraction Based Overlay Metrology for Double Patterning Technologies
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| Main Authors: | , , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2011
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/24510 |
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| _version_ | 1839562650068975616 |
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| author | Dasari, Prasad Li, Jie Hu, Jiangtao Kritsun, Nigel Smith and Oleg |
| author_facet | Dasari, Prasad Li, Jie Hu, Jiangtao Kritsun, Nigel Smith and Oleg |
| author_sort | Dasari, Prasad |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/21970 |
| first_indexed | 2025-08-04T21:40:52Z |
| format | Electronic Book Chapter |
| fullrecord | <oai_dc:dc xmlns:oai_dc="http://www.openarchives.org/OAI/2.0/oai_dc/" xmlns:dc="http://purl.org/dc/elements/1.1/" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xsi:schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><identifier>InTech-24510</identifier><datestamp>2011-12-02</datestamp>
<dc:title>Diffraction Based Overlay Metrology for Double Patterning Technologies</dc:title>
<dc:creator>Prasad Dasari</dc:creator>
<dc:creator>Jie Li</dc:creator>
<dc:creator>Jiangtao Hu</dc:creator>
<dc:creator>Nigel Smith and
Oleg Kritsun</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2011-12-02</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/24510</dc:identifier>
<dc:identifier>doi:10.5772/21970</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-307-602-7</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/334 ; Recent Advances in Nanofabrication Techniques and Applications</dc:source>
</oai_dc:dc> |
| id | InTech-24510 |
| institution | Matheson Library |
| isbn | 978-953-307-602-7 |
| language | English |
| last_indexed | 2025-08-04T21:40:52Z |
| publishDate | 2011 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-245102011-12-02 Diffraction Based Overlay Metrology for Double Patterning Technologies Prasad Dasari Jie Li Jiangtao Hu Nigel Smith and Oleg Kritsun Physical Sciences, Engineering and Technology None IntechOpen 2011-12-02 Chapter, Part Of Book https://www.intechopen.com/chapters/24510 doi:10.5772/21970 en ISBN:978-953-307-602-7 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/334 ; Recent Advances in Nanofabrication Techniques and Applications |
| spellingShingle | Physical Sciences, Engineering and Technology Dasari, Prasad Li, Jie Hu, Jiangtao Kritsun, Nigel Smith and Oleg Diffraction Based Overlay Metrology for Double Patterning Technologies |
| title | Diffraction Based Overlay Metrology for Double Patterning Technologies |
| title_full | Diffraction Based Overlay Metrology for Double Patterning Technologies |
| title_fullStr | Diffraction Based Overlay Metrology for Double Patterning Technologies |
| title_full_unstemmed | Diffraction Based Overlay Metrology for Double Patterning Technologies |
| title_short | Diffraction Based Overlay Metrology for Double Patterning Technologies |
| title_sort | diffraction based overlay metrology for double patterning technologies |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/24510 |
| work_keys_str_mv | AT dasariprasad diffractionbasedoverlaymetrologyfordoublepatterningtechnologies AT lijie diffractionbasedoverlaymetrologyfordoublepatterningtechnologies AT hujiangtao diffractionbasedoverlaymetrologyfordoublepatterningtechnologies AT kritsunnigelsmithandoleg diffractionbasedoverlaymetrologyfordoublepatterningtechnologies |