$Diffraction Based Overlay Metrology for Double Patterning Technologies$
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Diffraction Based Overlay Metrology for Double Patterning Technologies

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Bibliographic Details
Main Authors:	Dasari, Prasad, Li, Jie, Hu, Jiangtao, Kritsun, Nigel Smith and Oleg
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/24510
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