Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing

Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing

A new method for fabricating a high-quality buried-heterostructure optical waveguide using quantum well intermixing (QWI) has been demonstrated. By patterning a SiO<sub>2</sub> thin film on top of a multiple quantum well (MQW) heterostructure, rapid thermal annealing (RTA) could induce l...

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Bibliographic Details
Main Authors: Yang-Jeng Chen, Rih-You Chen, Chih-Hsien Chen, Yu-Hung Lin, Cong-Long Chen, Po-Yun Wang, Yen-Hsiang Chang, Yi-Jen Chiu
Format: Article
Language:English
Published: IEEE 2020-01-01
Series:IEEE Photonics Journal
Subjects:
Quantum well intermixing
low loss waveguide
buried waveguide
electroabsorption modulator (EAM).
Online Access:https://ieeexplore.ieee.org/document/9024120/
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