Investigation and Improvement of Inconsistency in Surface-Form Measurement Results Due to Difference of Incident Direction of Measuring Light in Abramson-Type Oblique-Incident Interferometer

An Abramson-type oblique-incident interferometer was used for the surface-form measurement of hand-scraped marks consisting of rough surfaces. Although the Abramson interferometer could measure the rough surface of hand-scraped marks under noncontact conditions, the inconsistency in the measurement...

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Bibliographic Details
Main Authors: So Ito, Takumi Yamagishi, Kimihisa Matsumoto, Kazuhide Kamiya
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Metrology
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Online Access:https://www.mdpi.com/2673-8244/5/2/34
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