Silicon Nitride/Silicon Dioxide Echelle Grating Spectrometer for Operation Near 1.55 μm
Here we use an electron beam lithography system to pattern an <inline-formula><tex-math notation="LaTeX"> ${\rm{S}}{{\rm{i}}_{3}}{{\rm{N}}_{4}}{\rm{/Si}}{{\rm{O}}_{2}}$</tex-math></inline-formula> echelle grating using silver as a reflector on the grating grooves. T...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2018-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8538877/ |
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