Multi-axis stress sensing of bending and torsion using nano-diamond NVC fixed on a Si cantilever
In this study, we developed a cantilever-type force probe with a nano-diamond nitrogen vacancy color center (NVC) fixed on Si surface by sputtered SiO2 layer. We explored the correlation between the optically detected magnetic resonance (ODMR) spectrum’s peak shift and the stress intensity caused by...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2024-12-01
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| Series: | Functional Diamond |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/26941112.2024.2389801 |
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