APA (7th ed.) Citation

Xiaoliang, H., Yingwei, Z., Hu, S., Xiuhai, W., Jian, C., Peisheng, M., & Zesheng, R. (2022). Research on the application of thermal field emission gun in electron beam lithography. National Computer System Engineering Research Institute of China.

Chicago Style (17th ed.) Citation

Xiaoliang, Hao, Zhao Yingwei, Sun Hu, Wang Xiuhai, Cao Jian, Ma Peisheng, and Ren Zesheng. Research on the Application of Thermal Field Emission Gun in Electron Beam Lithography. National Computer System Engineering Research Institute of China, 2022.

MLA (9th ed.) Citation

Xiaoliang, Hao, et al. Research on the Application of Thermal Field Emission Gun in Electron Beam Lithography. National Computer System Engineering Research Institute of China, 2022.