High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process

High-Performance and Fabrication-Tolerant 3 dB Adiabatic Coupler Based on Ultralow-Loss Silicon Waveguide by Tri-Layer Hard Mask Etching Process

Silicon photonics has emerged as critical for advancing photonic integrated circuits (PICs), but waveguide losses, primarily resulting from sidewall roughness, remain a primary challenge. In this work, we demonstrate a tri-layer hard mask etching process that produces strip silicon waveguides with p...

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Bibliographic Details
Main Authors: Ke Zhang, Yunchu Yu, Nanfei Zhu, Senlin Zhang, Jie Sun, Shijin Ding, David Wei Zhang
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Nanomaterials
Subjects:
silicon photonics
ultralow loss
waveguide
adiabatic directional coupler
Online Access:https://www.mdpi.com/2079-4991/15/12/947
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