Understanding the Growth and Properties of Sputter‐Deposited Phase‐Change Superlattice Films
Abstract Highly textured chalcogenide films have recently gained significant interest for phase‐change memory applications. Several reports have highlighted that programming efficiency improves in devices featuring superlattice stacks, such as Ge2Sb2Te5/Sb2Te3. However, to be technologically relevan...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley-VCH
2025-06-01
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| Series: | Advanced Materials Interfaces |
| Subjects: | |
| Online Access: | https://doi.org/10.1002/admi.202500058 |
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