Ar+ implantation-induced tailoring of RF-sputtered ZnO films: structural, morphological, and optical properties
Radio frequency-sputtered zinc oxide films are implanted with 30 keV Ar+ ions at various fluences ranging from 1 × 1015 to 2 × 1016 ions·cm−2. Raman spectra reveal the presence of the E2 (low), E2 (high), and A1 (LO) Raman modes in pristine and implanted ZnO films. A gradual fall and rise in peak in...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Beilstein-Institut
2025-06-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.16.66 |
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