Research Status and Prospect of Anti - Friction and Anti - Wear Modification of Silicon Material Surface
In recent years, micro-electro-mechanical system(MEMS) has been developed rapidly, but the problem of friction and wear between micro-components in which relative motion occurs in the system has not been well resolved, limiting its further widespread application and in-depth development. In this pap...
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| Format: | Article |
| Language: | Chinese |
| Published: |
Editorial Department of Materials Protection
2021-08-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20210822.pdf |
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