The Design and Performance Evaluation of an Eye-Tracking System Based on an Electrostatic MEMS Scanning Mirror

In this paper, we proposed an eye-tracking system featuring a small size and high scanning frequency, utilizing an electrostatic biaxial scanning mirror fabricated through a micro-electro-mechanical system (MEMS) process. A laser beam is directed onto the mirror, and the two axes of the mirror gener...

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Bibliographic Details
Main Authors: Minqiang Li, Lin Qin, Xiasheng Wang, Jiaojiao Wen, Tong Wu, Xiaoming Huang, Hongbo Yin, Yi Tian, Zhuqing Wang
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/16/6/640
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