Formation OF ZINC OXIDE THIN FILMS BY COMBINED METHOD OF HYDROTHERMAL AND LAYERED ATOM DEPOSITION
Properties and deposition of continuous thin zinc oxide films by chemical on the monocrystalline silicon substrates with zinc oxide seed layer formed by atomic layer deposition are studied. Obtained hybrid zinc oxide structures consist of vertically oriented crystallites packed in uniform continuous...
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| Main Authors: | , , , , |
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| 格式: | Article |
| 語言: | 俄语 |
| 出版: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2019-06-01
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| 叢編: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
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| 在線閱讀: | https://doklady.bsuir.by/jour/article/view/665 |
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