Improved Crystalline Quality of AlN by Epitaxial Lateral Overgrowth Using Two-Phase Growth Method for Deep-Ultraviolet Stimulated Emission
We report on the maskless epitaxial lateral overgrowth (ELOG) of the AlN layer on trench-patterned AlN/sapphire templates by metal-organic chemical vapor deposition (MOCVD). With a two-phase growth of different V/III ratio at a relatively low growth temperature of 1250 °C, up t...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7582371/ |
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