Research Progress of (Ti,Al,Cr)N Hard Film System
In this work, the deposition method of (Ti,Al,Cr)N film system was summarized, and the effects of the chemical composition, N2 flow rate, the substrate bias voltage on the films were discussed. The phase composition, the film composition, the oxidation resistance, the corrosion resistance...
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| Format: | Article |
| Language: | Chinese |
| Published: |
Editorial Department of Materials Protection
2021-03-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20210323.pdf |
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