Effect of Working Gas on the Thermal Stability and Mechanical Property of Hydrogenated DLC Coatings
In order to reveal the influence of working gas on DLC coating and provide reference for the application of DLC at high temperature, different hydrogen-containing diamond-like carbon films(a-C:H)were prepared on 304 stainless steel substrate by plasma-enhanced chemical vapor deposition(PE-CVD)with d...
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| Main Author: | |
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| Format: | Article |
| Language: | Chinese |
| Published: |
Editorial Department of Materials Protection
2021-06-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20210603.pdf |
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