Low-Loss Compact Silicon Nitride Arrayed Waveguide Gratings for Photonic Integrated Circuits
We report on low-loss, low-crosstalk, and compact arrayed waveguide gratings (AWGs) based on a 200-nm-thick-Si<sub>3 </sub>N<sub>4</sub>-core platform. High-resolution fabrication processes realized four types of Si<sub>3</sub>N<sub>4 </sub> AWG device...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/8030983/ |
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