800 kHz Femtosecond Laser Cleaning of Microwave Plasma Chemical Vapor Deposition Diamond Growth Substrate

Microwave Plasma Chemical Vapor Deposition (MPCVD) plays a crucial role in the growth of high-quality diamonds. However, during the MPCVD process, residues such as polycrystalline diamond, and graphite often adhere to the high-temperature growth substrate surfaces, potentially degrading diamond grow...

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Bibliographic Details
Main Authors: Xiwang Wu, Xin Chen
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Crystals
Subjects:
Online Access:https://www.mdpi.com/2073-4352/15/6/517
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