Thin Epitaxial Ionic Fluoride Films for Electronics Applications

The realization of novel electronic devices based on 2D materials, i.e., field-effect transistors, has recently stimulated a renewed interest regarding ultrathin fluoride epitaxial films. Thanks to their chemical and dielectric properties, ionic fluorides could have the potential to be used as insul...

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Main Authors: Giulia Giovanelli, Mauro Borghi, Alessandro Lodi, Tibor Grasser, Luca Pasquali
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Surfaces
Subjects:
Online Access:https://www.mdpi.com/2571-9637/8/2/22
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author Giulia Giovanelli
Mauro Borghi
Alessandro Lodi
Tibor Grasser
Luca Pasquali
author_facet Giulia Giovanelli
Mauro Borghi
Alessandro Lodi
Tibor Grasser
Luca Pasquali
author_sort Giulia Giovanelli
collection DOAJ
description The realization of novel electronic devices based on 2D materials, i.e., field-effect transistors, has recently stimulated a renewed interest regarding ultrathin fluoride epitaxial films. Thanks to their chemical and dielectric properties, ionic fluorides could have the potential to be used as insulators in many applications that require high processing control down to the nanoscale. Here we provide a review of some of the principal results that have been achieved in the past decades regarding the controlled growth of epitaxial fluorides on different types of materials relevant for electronics. The aim is to provide a concise summary of the growth modes, crystallinity, film morphologies, and chemical interactions of different types of fluorides on different type of substrates, highlighting the possibilities of applications and the future perspectives.
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series Surfaces
spelling doaj-art-4f70a5c9cd6f4e4cbd7e8469c47f56c62025-06-25T14:27:29ZengMDPI AGSurfaces2571-96372025-03-01822210.3390/surfaces8020022Thin Epitaxial Ionic Fluoride Films for Electronics ApplicationsGiulia Giovanelli0Mauro Borghi1Alessandro Lodi2Tibor Grasser3Luca Pasquali4Department of Engineering “Enzo Ferrari”, University of Modena and Reggio Emilia, Via Vivarelli 10, 41125 Modena, ItalyInstitute for Microelectronics (TU Wien), Gusshausstrasse 27–29, 1040 Vienna, AustriaDepartment of Engineering “Enzo Ferrari”, University of Modena and Reggio Emilia, Via Vivarelli 10, 41125 Modena, ItalyInstitute for Microelectronics (TU Wien), Gusshausstrasse 27–29, 1040 Vienna, AustriaDepartment of Engineering “Enzo Ferrari”, University of Modena and Reggio Emilia, Via Vivarelli 10, 41125 Modena, ItalyThe realization of novel electronic devices based on 2D materials, i.e., field-effect transistors, has recently stimulated a renewed interest regarding ultrathin fluoride epitaxial films. Thanks to their chemical and dielectric properties, ionic fluorides could have the potential to be used as insulators in many applications that require high processing control down to the nanoscale. Here we provide a review of some of the principal results that have been achieved in the past decades regarding the controlled growth of epitaxial fluorides on different types of materials relevant for electronics. The aim is to provide a concise summary of the growth modes, crystallinity, film morphologies, and chemical interactions of different types of fluorides on different type of substrates, highlighting the possibilities of applications and the future perspectives.https://www.mdpi.com/2571-9637/8/2/22ionic fluoridesthin filmsepitaxy
spellingShingle Giulia Giovanelli
Mauro Borghi
Alessandro Lodi
Tibor Grasser
Luca Pasquali
Thin Epitaxial Ionic Fluoride Films for Electronics Applications
Surfaces
ionic fluorides
thin films
epitaxy
title Thin Epitaxial Ionic Fluoride Films for Electronics Applications
title_full Thin Epitaxial Ionic Fluoride Films for Electronics Applications
title_fullStr Thin Epitaxial Ionic Fluoride Films for Electronics Applications
title_full_unstemmed Thin Epitaxial Ionic Fluoride Films for Electronics Applications
title_short Thin Epitaxial Ionic Fluoride Films for Electronics Applications
title_sort thin epitaxial ionic fluoride films for electronics applications
topic ionic fluorides
thin films
epitaxy
url https://www.mdpi.com/2571-9637/8/2/22
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AT mauroborghi thinepitaxialionicfluoridefilmsforelectronicsapplications
AT alessandrolodi thinepitaxialionicfluoridefilmsforelectronicsapplications
AT tiborgrasser thinepitaxialionicfluoridefilmsforelectronicsapplications
AT lucapasquali thinepitaxialionicfluoridefilmsforelectronicsapplications