A Voxelized Transformer-Based Neural Network for 3D Reconstruction From Multi-Energy SEM Backscattered Electrons

A Voxelized Transformer-Based Neural Network for 3D Reconstruction From Multi-Energy SEM Backscattered Electrons

Three-dimensional (3D) data analysis, especially 3D reconstruction, is critical within integrated circuits for quality control and inspection. The traditional 3D reconstruction, like multi-energy deconvolution scanning electron microscopy (MED-SEM), can achieved resolution of 5 nm in the horizontal...

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Bibliographic Details
Main Authors: Caizhi Zheng, Ronghan Hong, Hao-Jie Hu, Qing Huo Liu
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Access
Subjects:
3D reconstruction
deep learning
machine learning
scanning electron microscopy
Online Access:https://ieeexplore.ieee.org/document/11045923/
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https://ieeexplore.ieee.org/document/11045923/

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