Novel surface-acoustic wave transducers

The conventional means of launching a Surface Acoustic Wave on a piezoelectric substrate is by using an inter-digital transducer. A modified structure using multilayer deposition, but only a single critical photolithography stage, is proposed in this paper. The potential advantages of this structure...

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Autore principale: R. C. WOODS
Natura: Articolo
Lingua:inglese
Pubblicazione: Institute of Fundamental Technological Research Polish Academy of Sciences 2014-05-01
Serie:Archives of Acoustics
Accesso online:https://acoustics.ippt.pan.pl/index.php/aa/article/view/1178
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