Novel surface-acoustic wave transducers
The conventional means of launching a Surface Acoustic Wave on a piezoelectric substrate is by using an inter-digital transducer. A modified structure using multilayer deposition, but only a single critical photolithography stage, is proposed in this paper. The potential advantages of this structure...
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| Formaat: | Artikel |
| Taal: | Engels |
| Gepubliceerd in: |
Institute of Fundamental Technological Research Polish Academy of Sciences
2014-05-01
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| Reeks: | Archives of Acoustics |
| Online toegang: | https://acoustics.ippt.pan.pl/index.php/aa/article/view/1178 |
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