Fabrication and Characterization of a PZT-Based Touch Sensor Using Combined Spin-Coating and Sputtering Methods
This study presents the successful fabrication of lead zirconate titanate (PZT) thin films on silicon (Si) substrates using a hybrid deposition method combining spin-coating and RF sputtering techniques. Initially, a PZT layer was deposited through four successive spin-coating cycles, followed by an...
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| Main Authors: | , , |
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| 格式: | Article |
| 語言: | 英语 |
| 出版: |
MDPI AG
2025-06-01
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| 叢編: | Sensors |
| 主題: | |
| 在線閱讀: | https://www.mdpi.com/1424-8220/25/13/3938 |
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