CALCULATION OF GROWTH RATES AND COMPOSITIONS OF NANOLAYERS In<sub>X</sub>Ga<sub>1-X</sub>As ON A InP SUBSTRATE USING A 3D MODEL OF A HORIZONTAL MOVPE REACTOR
A three-dimensional (3D) detailed heat, mass and momentum transfer model was constructed to describe the thermal behavior, fluid dynamics and the diffusion in a horizontal metal-organic vapor-phase epitaxy (MOVPE) reactor with a rectangular section and a rotated substrate keeper with inductive heati...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | Russian |
| Published: |
MIREA - Russian Technological University
2013-08-01
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| Series: | Тонкие химические технологии |
| Subjects: | |
| Online Access: | https://www.finechem-mirea.ru/jour/article/view/576 |
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