Research on Drive and Detection Technology of CMUT Multi-Array Transducers Based on MEMS Technology

Research on Drive and Detection Technology of CMUT Multi-Array Transducers Based on MEMS Technology

This paper presents an ultrasonic driving and detection system based on a CMUT array using MEMS technology. Among them, the core component CMUT array is composed of 8 × 8 CMUT array elements, and each CMUT array element contains 6 × 6 CMUT units. The collapse voltage of a single CMUT unit obtained t...

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Bibliographic Details
Main Authors: Chenyuan Li, Jiagen Chen, Chengwei Liu, Yao Xie, Yangyang Cui, Shiwang Zhang, Zhikang Li, Libo Zhao, Guoxing Chen, Shaochong Wei, Yu Gao, Linxi Dong
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
Subjects:
micro-electro-mechanical systems (MEMS)
capacitive micromachined ultrasonic transducer (CMUT)
finite element analysis (FEA)
driving and detection
Online Access:https://www.mdpi.com/2072-666X/16/6/604
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https://www.mdpi.com/2072-666X/16/6/604

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