Finite Element Modelling of Atomic Force Microscope Cantilever Beams with Uncertainty in Material and Dimensional Parameters
The stiffness and the natural frequencies of a rectangular and a V-shaped micro-cantilever beams used in Atomic Force Microscope (AFM) were analysed using the Finite Element (FE) method. A determinate analysis in the material and dimensional parameters was first carried out to compare with published...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Fundamental Technological Research
2014-12-01
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| Series: | Engineering Transactions |
| Subjects: | |
| Online Access: | https://et.ippt.pan.pl/index.php/et/article/view/265 |
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