I–V Characteristics and Electrical Reliability of Metal–Si<sub>x</sub>N<sub>y</sub>–Metal Capacitors as a Function of Nitrogen Bonding Composition

I–V Characteristics and Electrical Reliability of Metal–Si<sub>x</sub>N<sub>y</sub>–Metal Capacitors as a Function of Nitrogen Bonding Composition

In this study, we analyzed the electrical characteristics of metal–insulator–metal (MIM) capacitors fabricated with reference to insulator (Si<sub>x</sub>N<sub>y</sub>) thickness and deposition condition. Si<sub>x</sub>N<sub>y</sub> thicknesses of 650...

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Bibliographic Details
Main Authors: Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Songhun Yoon, Sung-Gyu Pyo
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Micromachines
Subjects:
MIM
capacitors
metal–insulator–metal
electrical performance
Si<sub>x</sub>N<sub>y</sub>
leakage current density
Online Access:https://www.mdpi.com/2072-666X/16/6/615
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