Fabrication of 3D Micro- and Nano-Structures by Prism-Assisted UV and Holographic Lithography
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| Main Authors: | , , |
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| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2013
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/45284 |
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