Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition
None
Saved in:
| Main Author: | |
|---|---|
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
|
| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/37191 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|