Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage
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| Hauptverfasser: | , |
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| Format: | Elektronisch Buchkapitel |
| Sprache: | Englisch |
| Veröffentlicht: |
IntechOpen
2012
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| Schlagworte: | |
| Online-Zugang: | https://www.intechopen.com/chapters/37187 |
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| _version_ | 1839566054111576064 |
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| author | Shamiryan, Denis Likhachev, Dmitriy V. |
| author_facet | Shamiryan, Denis Likhachev, Dmitriy V. |
| author_sort | Shamiryan, Denis |
| collection | InTech Open eBooks |
| description | None |
| doi_str_mv | 10.5772/37758 |
| first_indexed | 2025-08-04T22:34:59Z |
| format | Electronic Book Chapter |
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<dc:title>Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage</dc:title>
<dc:creator>Denis Shamiryan</dc:creator>
<dc:creator>Dmitriy V. Likhachev</dc:creator>
<dc:subject>Physical Sciences, Engineering and Technology</dc:subject>
<dc:description>None</dc:description>
<dc:publisher>IntechOpen</dc:publisher>
<dc:date>2012-05-30</dc:date>
<dc:type>Chapter, Part Of Book</dc:type>
<dc:identifier>https://www.intechopen.com/chapters/37187</dc:identifier>
<dc:identifier>doi:10.5772/37758</dc:identifier>
<dc:language>en</dc:language>
<dc:relation>ISBN:978-953-51-0634-0</dc:relation>
<dc:rights>https://creativecommons.org/licenses/by/3.0/</dc:rights>
<dc:source>https://www.intechopen.com/books/1421 ; Ion Implantation</dc:source>
</oai_dc:dc> |
| id | InTech-37187 |
| institution | Matheson Library |
| isbn | 978-953-51-0634-0 |
| language | English |
| last_indexed | 2025-08-04T22:34:59Z |
| publishDate | 2012 |
| publisher | IntechOpen |
| record_format | intech |
| spelling | InTech-371872012-05-30 Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage Denis Shamiryan Dmitriy V. Likhachev Physical Sciences, Engineering and Technology None IntechOpen 2012-05-30 Chapter, Part Of Book https://www.intechopen.com/chapters/37187 doi:10.5772/37758 en ISBN:978-953-51-0634-0 https://creativecommons.org/licenses/by/3.0/ https://www.intechopen.com/books/1421 ; Ion Implantation |
| spellingShingle | Physical Sciences, Engineering and Technology Shamiryan, Denis Likhachev, Dmitriy V. Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage |
| title | Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage |
| title_full | Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage |
| title_fullStr | Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage |
| title_full_unstemmed | Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage |
| title_short | Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage |
| title_sort | spectroscopic ellipsometry of ion implantation induced damage |
| topic | Physical Sciences, Engineering and Technology |
| url | https://www.intechopen.com/chapters/37187 |
| work_keys_str_mv | AT shamiryandenis spectroscopicellipsometryofionimplantationinduceddamage AT likhachevdmitriyv spectroscopicellipsometryofionimplantationinduceddamage |