Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

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Bibliographic Details
Main Authors:	Shamiryan, Denis, Likhachev, Dmitriy V.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/37187
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