Integration of Electrografted Layers for the Metallization of Deep Through Silicon Vias
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| Main Author: | Raynal, Frederic |
|---|---|
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2012
|
| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/35384 |
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