Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

QR Code

Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

None

Saved in:

Bibliographic Details
Main Authors:	Serrano, Justin R., Phinney, Leslie M.
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/33599
Tags:	Add Tag No Tags, Be the first to tag this record!

Similar Items

Thermal Microactuators
by: Phinney, Leslie M., et al.
Published: (2012)

ArF Excimer Laser Annealing of Polycrystalline Silicon Thin Film
by: Bidin, Noriah, et al.
Published: (2012)

Optical MEMS
by: Piyawattanametha, Wibool, et al.
Published: (2012)

Strength Reliability of Micro Polycrystalline Silicon Structure
by: Hamada, Shigeru, et al.
Published: (2011)

Laser Applications of Transparent Polycrystalline Ceramic
by: Lou, Qihong, et al.
Published: (2011)

Design and Fabrication of a Novel MEMS Silicon Microphone
by: Ganji, Bahram Azizollah
Published: (2011)

Thermal Diffusivity of Ceramics During Neutron Irradiation
by: Akiyoshi, Masafumi, et al.
Published: (2011)

MEMS Characterization Based on Optical Measuring Methods
by: Guo, Tong, et al.
Published: (2012)

Oriented Lateral Growth and Defects in Polycrystalline-Silicon Thin Films on Glass Substrates
by: Kitahara, Kuninori, et al.
Published: (2012)

Application of Electron Beam Treatment in Polycrystalline Silicon Films Manufacture for Solar Cell
by: Fu, L.
Published: (2011)

Low Temperature Chemical Vapour Deposition of Polycrystalline Silicon Carbide Film Using Monomethylsilane Gas
by: Habuka, Hitoshi
Published: (2011)

Optical and Structural Studies of Binary Compounds by Explosive Laser Irradiation and Heat Treatment
by: Kar, S.
Published: (2011)

Strength of a Polycrystalline Material
by: Galptshyan, P.V.
Published: (2012)

Sintering to Transparency of Polycrystalline Ceramic Materials
by: Suárez, Marta, et al.
Published: (2012)

Microstructural Evolution in α-Al2O3 Compacts During Laser Irradiation
by: Vlasova, Marina, et al.
Published: (2011)

Quantum Optics Phenomena in Synthetic Opal Photonic Crystals
by: Moiseyenko, Vasilij, et al.
Published: (2012)

Integrated MEMS: Opportunities & Challenges
by: French, P.J., et al.
Published: (2012)

Grain-Scale Modeling Approaches for Polycrystalline Aggregates
by: Simonovski, Igor, et al.
Published: (2012)

Modeling the Physical Phenomena Involved by Laser Beam – Substance Interaction
by: Pearsica, Marian, et al.
Published: (2011)

Integrated ASIC System and CMOS-MEMS Thermally Actuated Optoelectronic Switch Array for Communication Network
by: Liou, Jian-Chiun
Published: (2011)

Nonlinear Optoelectronic Devices Based on Nanocrystalline Silicon Films: Acoustoelectrical Switches for Optical Modes, Nonliear Optical Switches and Lasers
by: Milovzorov, Dmitry E.
Published: (2011)

Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review
by: Peña-Rodríguez, Ovidio, et al.
Published: (2012)

Release Optimization of Suspended Membranes in MEMS
by: Mendoza-Acevedo, Salvador, et al.
Published: (2012)

Integrated Microfluidic MEMS and Their Biomedical Applications
by: Bani-Yaseen, Abdulilah A. Dawoud
Published: (2011)

MEMS Biomedical Sensor for Gait Analysis
by: Wahab, Yufridin, et al.
Published: (2011)

MEMS Based on Thin Ferroelectric Layers
by: Baginsky, Igor L., et al.
Published: (2011)

MEMS Gyroscopes for Consumers and Industrial Applications
by: Antonello, Riccardo, et al.
Published: (2011)

Electrical Processes in Polycrystalline BiFeO3 Film
by: Li, Yawei, et al.
Published: (2011)

MEMS Microfluidics for Lab-on-a-Chip Applications
by: Islam, Nazmul, et al.
Published: (2012)

Surface Characterization and Interfacial Adhesion in MEMS Devices
by: Peng, Y. F., et al.
Published: (2012)

Macromodels of Micro-Electro-Mechanical Systems (MEMS)
by: Petrenko, Anatoly
Published: (2012)

Plasma Based Dry Release of MEMS Devices
by: Rahman, Hamood Ur
Published: (2012)

Chaos Analysis and Control in AFM and MEMS Resonators
by: Davaie-Markazi, Amir Hossein, et al.
Published: (2011)

FAIMS Biochemical Sensor Based on MEMS Technology
by: Tang, Fei, et al.
Published: (2011)

Heat Transfer Phenomena in Laminar Wavy Falling Films: Thermal Entry Length, Thermal-Capillary Metastable Structures, Thermal-Capillary Breakdown
by: Lel, Viacheslav V., et al.
Published: (2011)

Carrier Transport Phenomena in Metal Contacts to AlInGaN-Based Laser Diodes
by: Kwak, Joon Seop
Published: (2012)

Optical Properties and Applications of Silicon Carbide in Astrophysics
by: Pitman, Karly M., et al.
Published: (2011)

The Selective Growth of Silicon Nanowires and Their Optical Activation
by: Ren, Lingling, et al.
Published: (2011)

Influence of Laser Irradiation Times on Properties of Porous Silicon
by: Baghdad Science Journal
Published: (2007-12-01)

MEMS Based Deep 1D Photonic Crystal
by: Malak, Maurine, et al.
Published: (2012)