Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

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Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

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Détails bibliographiques
Auteurs principaux:	Serrano, Justin R., Phinney, Leslie M.
Format:	Électronique Chapitre de livre
Langue:	anglais
Publié:	IntechOpen 2012
Sujets:	Physical Sciences, Engineering and Technology
Accès en ligne:	https://www.intechopen.com/chapters/33599
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