X-Ray Analysis on Ceramic Materials Deposited by Sputtering and Reactive Sputtering for Sensing Applications

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X-Ray Analysis on Ceramic Materials Deposited by Sputtering and Reactive Sputtering for Sensing Applications

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Bibliographic Details
Main Authors:	Gazia, Rossana, Chiodoni, Angelica, Celasco, Edvige, Bianco, Stefano, Mandracci, Pietro
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/27345
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