The Use of Electron Probe MicroAnalysis to Determine the Thickness of Thin Films in Materials Science

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Bibliographic Details
Main Authors:	Christien, Frédéric, Ferchaud, Edouard, Nowakowski, Pawel, Allart, Marion
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2012
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/27340
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