APA (7th ed.) Citation

Dasari, P., Li, J., Hu, J., & Kritsun, N. S. a. O. (2011). Diffraction Based Overlay Metrology for Double Patterning Technologies. IntechOpen. https://doi.org/10.5772/21970

Chicago Style (17th ed.) Citation

Dasari, Prasad, Jie Li, Jiangtao Hu, and Nigel Smith and Oleg Kritsun. Diffraction Based Overlay Metrology for Double Patterning Technologies. IntechOpen, 2011. https://doi.org/10.5772/21970.

MLA (9th ed.) Citation

Dasari, Prasad, et al. Diffraction Based Overlay Metrology for Double Patterning Technologies. IntechOpen, 2011. https://doi.org/10.5772/21970.