Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale
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| Main Authors: | Cattoni, Andrea, Chen, Jing, Decanini, Dominique, Shi, Jian, Haghiri-Gosnet, Anne-Marie |
|---|---|
| Format: | Electronic Book Chapter |
| Language: | English |
| Published: |
IntechOpen
2011
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| Subjects: | |
| Online Access: | https://www.intechopen.com/chapters/24495 |
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