Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale

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Bibliographic Details
Main Authors:	Cattoni, Andrea, Chen, Jing, Decanini, Dominique, Shi, Jian, Haghiri-Gosnet, Anne-Marie
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/24495
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