Atomic Layer Deposition of High-k Oxides on Graphene

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Bibliographic Details
Main Authors:	Alles, Harry, Aarik, Jaan, Kozlova, Jekaterina, Niilisk, Ahti, Rammula, Raul, Sammelselg, Väino
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/19780
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