Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering

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Detection and Characterization of Nano-Defects Located on Micro-Structured Substrates by Means of Light Scattering

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Bibliographic Details
Main Authors:	Albella, Pablo, González, Francisco, Moreno, Fernando, Saiz, José María, Videen, Gorden
Format:	Electronic Book Chapter
Language:	English
Published:	IntechOpen 2011
Subjects:	Physical Sciences, Engineering and Technology
Online Access:	https://www.intechopen.com/chapters/14161
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