Sputtering by particle bombardment III : characteristics of sputtered particles, technical applicationsm /

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Bibliographic Details
Other Authors: Behrisch, Rainer, Andersen, Hans Henrik
Format: Book
Language:English
Published: Berlin : Springer-Verlag, c1991.
Series:Topics in applied physics ; 64
Subjects:
Sputtering (Physics)
Surfaces (Physics) > Effect of radiation on.
Solids > Effect of radiation on
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Table of Contents:
  • 1. Physical sputtering of single-element solids
  • 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography
  • 3. Characteristics of sputtered particles, technical applications.

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