Loading…
Sputtering by particle bombardment III : characteristics of sputtered particles, technical applicationsm /
Saved in:
| Other Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin :
Springer-Verlag,
c1991.
|
| Series: | Topics in applied physics ;
64 |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Physical Description: | xii, 410 p. : ill. |
|---|---|
| ISBN: | 3540534288 |