Coupled Bilayer Photonic Crystal Slab Electro-Optic Spatial Light Modulators
We demonstrate here a surface-normal ultracompact Fano resonance electro-optic spatial light modulator employing a stacked photonic crystal membrane capacitor-like structure. Vertically coupled optical resonance near 1.5 μm was observed, and both blue and red spectral shifts were achieved...
Saved in:
| Main Authors: | , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
IEEE
2017-01-01
|
| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7866012/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | We demonstrate here a surface-normal ultracompact Fano resonance electro-optic spatial light modulator employing a stacked photonic crystal membrane capacitor-like structure. Vertically coupled optical resonance near 1.5 μm was observed, and both blue and red spectral shifts were achieved by means of appropriate electrical bias. A 200-MHz modulation bandwidth was obtained on a device with an 80 μm × 80 μm mesa area, while bandwidths in the gigahertz range are expected by shrinking the mesa lateral size down to 20 μm × 20 μm. We fabricated 6 × 6 arrays with different mesa sizes on a silicon-on-insulator platform, illustrating the potential of these devices in vertically integrated photonic technologies and for high-speed spatial light modulations. |
|---|---|
| ISSN: | 1943-0655 |