Fabrication and Characterization of High-Optical-Quality-Factor Hybrid Polymer Microring Resonators Operating at Very Near Infrared Wavelengths
In this paper, we present a new fabrication method for large-area hybrid polymer microring resonators using a rib waveguide configuration with a minimum residual layer down to 40 nm by ultraviolet (UV) nanoimprint lithography. In a first step, a negative photoresist (SU8-2) patterned by photolithogr...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2016-01-01
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| Series: | IEEE Photonics Journal |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/7437395/ |
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