APA (7th ed.) Citation

Solovjov, J. A., Pilipenko, V. A., & Yakovlev, V. P. (2020). Simulation of silicon wafers heating during rapid thermal processing using “UBTO 1801” unit. Educational institution «Belarusian State University of Informatics and Radioelectronics».

Chicago Style (17th ed.) Citation

Solovjov, J. A., V. A. Pilipenko, and V. P. Yakovlev. Simulation of Silicon Wafers Heating During Rapid Thermal Processing Using “UBTO 1801” Unit. Educational institution «Belarusian State University of Informatics and Radioelectronics», 2020.

MLA (9th ed.) Citation

Solovjov, J. A., et al. Simulation of Silicon Wafers Heating During Rapid Thermal Processing Using “UBTO 1801” Unit. Educational institution «Belarusian State University of Informatics and Radioelectronics», 2020.