Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing
A new method for fabricating a high-quality buried-heterostructure optical waveguide using quantum well intermixing (QWI) has been demonstrated. By patterning a SiO<sub>2</sub> thin film on top of a multiple quantum well (MQW) heterostructure, rapid thermal annealing (RTA) could induce l...
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2020-01-01
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| author | Yang-Jeng Chen Rih-You Chen Chih-Hsien Chen Yu-Hung Lin Cong-Long Chen Po-Yun Wang Yen-Hsiang Chang Yi-Jen Chiu |
| author_facet | Yang-Jeng Chen Rih-You Chen Chih-Hsien Chen Yu-Hung Lin Cong-Long Chen Po-Yun Wang Yen-Hsiang Chang Yi-Jen Chiu |
| author_sort | Yang-Jeng Chen |
| collection | DOAJ |
| description | A new method for fabricating a high-quality buried-heterostructure optical waveguide using quantum well intermixing (QWI) has been demonstrated. By patterning a SiO<sub>2</sub> thin film on top of a multiple quantum well (MQW) heterostructure, rapid thermal annealing (RTA) could induce laterally local QWI, resulting in a bandgap blueshift and a simultaneous decrease in the refractive index. Both lateral bandgap and index engineering could be attained along the MQW plane, which could be used for a buried-heterostructure optical waveguide. Two SiO<sub>2</sub> strips with 3, 5 and 7 μm windows were fabricated for waveguide on a 1540 nm InGaAsP MQW sample. A 120 nm blueshift under the SiO<sub>2</sub> area was observed, leading to the index contrast of 0.07. Far-field optical diffraction measurements were also performed to yield angles of 13.9°, 12.8° and 10.6°. A narrower window resulted in a narrower optical waveguide width and exhibited a larger diffraction angle, suggesting that QWI defined the buried optical waveguide. In addition, an electroabsorption modulator was also made by buried waveguide. A −10 dB low optical insertion loss and a 15 dB high extinction ratio in a 500 μm long waveguide were obtained, indicating that a buried heterostructure could be used for photonic devices and integration applications. |
| format | Article |
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| language | English |
| publishDate | 2020-01-01 |
| publisher | IEEE |
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| series | IEEE Photonics Journal |
| spelling | doaj-art-f4e849f3db844f7aae8f0175b8db70a02025-07-01T23:47:24ZengIEEEIEEE Photonics Journal1943-06552020-01-011221710.1109/JPHOT.2020.29784019024120Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well IntermixingYang-Jeng Chen0https://orcid.org/0000-0002-0183-765XRih-You Chen1https://orcid.org/0000-0003-4492-3707Chih-Hsien Chen2Yu-Hung Lin3Cong-Long Chen4Po-Yun Wang5Yen-Hsiang Chang6Yi-Jen Chiu7https://orcid.org/0000-0002-7185-0876Institute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanInstitute of Electro-Optical Engineering and Department of Photonics, National Sun Yat-sen University, Kaohsiung, TaiwanA new method for fabricating a high-quality buried-heterostructure optical waveguide using quantum well intermixing (QWI) has been demonstrated. By patterning a SiO<sub>2</sub> thin film on top of a multiple quantum well (MQW) heterostructure, rapid thermal annealing (RTA) could induce laterally local QWI, resulting in a bandgap blueshift and a simultaneous decrease in the refractive index. Both lateral bandgap and index engineering could be attained along the MQW plane, which could be used for a buried-heterostructure optical waveguide. Two SiO<sub>2</sub> strips with 3, 5 and 7 μm windows were fabricated for waveguide on a 1540 nm InGaAsP MQW sample. A 120 nm blueshift under the SiO<sub>2</sub> area was observed, leading to the index contrast of 0.07. Far-field optical diffraction measurements were also performed to yield angles of 13.9°, 12.8° and 10.6°. A narrower window resulted in a narrower optical waveguide width and exhibited a larger diffraction angle, suggesting that QWI defined the buried optical waveguide. In addition, an electroabsorption modulator was also made by buried waveguide. A −10 dB low optical insertion loss and a 15 dB high extinction ratio in a 500 μm long waveguide were obtained, indicating that a buried heterostructure could be used for photonic devices and integration applications.https://ieeexplore.ieee.org/document/9024120/Quantum well intermixinglow loss waveguideburied waveguideelectroabsorption modulator (EAM). |
| spellingShingle | Yang-Jeng Chen Rih-You Chen Chih-Hsien Chen Yu-Hung Lin Cong-Long Chen Po-Yun Wang Yen-Hsiang Chang Yi-Jen Chiu Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing IEEE Photonics Journal Quantum well intermixing low loss waveguide buried waveguide electroabsorption modulator (EAM). |
| title | Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing |
| title_full | Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing |
| title_fullStr | Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing |
| title_full_unstemmed | Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing |
| title_short | Low-Loss Buried-Heterostructure Optical Waveguide Based on Impurity-Free-Vacancy-Diffusion Quantum Well Intermixing |
| title_sort | low loss buried heterostructure optical waveguide based on impurity free vacancy diffusion quantum well intermixing |
| topic | Quantum well intermixing low loss waveguide buried waveguide electroabsorption modulator (EAM). |
| url | https://ieeexplore.ieee.org/document/9024120/ |
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