Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal
Processing errors can result in an asymmetric stiffness distribution within a microelectromechanical system (MEMS) disk resonator gyroscope (DRG) and thereby cause a mode mismatch and reduce the mechanical sensitivity and closed-loop scale factor stability. This paper proposes an automatic mode-matc...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/6/704 |
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