Emelyanov, V. V. (2022). Formation of Functional Silicon Nitride Layers by Selective Plasmochemical Etching. Educational institution «Belarusian State University of Informatics and Radioelectronics».
Chicago Style (17th ed.) CitationEmelyanov, V. V. Formation of Functional Silicon Nitride Layers by Selective Plasmochemical Etching. Educational institution «Belarusian State University of Informatics and Radioelectronics», 2022.
MLA (9th ed.) CitationEmelyanov, V. V. Formation of Functional Silicon Nitride Layers by Selective Plasmochemical Etching. Educational institution «Belarusian State University of Informatics and Radioelectronics», 2022.
Warning: These citations may not always be 100% accurate.