Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid

The efficiency of AlGaInP micro light-emitting diodes (micro-LEDs) was far weaker than that of GaN-based micro-LEDs in structure and performance. Consequently, there was an urgent demand to enhance their efficiency. In this study, a citric acid treatment strategy is proposed to improve the efficienc...

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Main Authors: Zhen-Jin Wang, Xin-Liang Ye, Chih-Chiang Yang, Wei-Chen Tu, Yan-Kuin Su
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Photonics Journal
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Online Access:https://ieeexplore.ieee.org/document/10415506/
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author Zhen-Jin Wang
Xin-Liang Ye
Chih-Chiang Yang
Wei-Chen Tu
Yan-Kuin Su
author_facet Zhen-Jin Wang
Xin-Liang Ye
Chih-Chiang Yang
Wei-Chen Tu
Yan-Kuin Su
author_sort Zhen-Jin Wang
collection DOAJ
description The efficiency of AlGaInP micro light-emitting diodes (micro-LEDs) was far weaker than that of GaN-based micro-LEDs in structure and performance. Consequently, there was an urgent demand to enhance their efficiency. In this study, a citric acid treatment strategy is proposed to improve the efficiency of red micro-LEDs, and the etching uniformity of different concentrations was first confirmed. We optimized the concentration of citric acid to 1:1 and modulated the wet etching time at 0, 30, 60, 90, and 120 s to treat the sidewalls of devices. Under an injection current density of 68 nA/cm<sup>2</sup>, the forward voltage (Vf) of micro-LEDs after soaking in citric acid ranged from 1.40 to 1.45 V. Compared with the sample operated at the forward voltage without citric acid sidewall treatment, AlGaInP micro-LEDs displayed significantly enhanced forward voltage. This indicates that citric acid effectively removed N-GaAs without damaging the electrical properties of the devices. Among all citric acid-treated micro-LEDs, the sample with a 60 s wet etching process showed the best improvement, with the light output power and external quantum efficiency (EQE) increased by 31.08&#x0025; and 5.4&#x0025;, respectively. Our proposed method to treat AlGaInP micro-LEDs presents promising opportunities for the future development of high-performance optoelectronics.
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publishDate 2024-01-01
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spelling doaj-art-e4e7f45a92a743a1a3b9fe1b68e9b2492025-07-01T23:59:22ZengIEEEIEEE Photonics Journal1943-06552024-01-011611710.1109/JPHOT.2024.335858710415506Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric AcidZhen-Jin Wang0https://orcid.org/0000-0002-7250-0501Xin-Liang Ye1Chih-Chiang Yang2https://orcid.org/0000-0002-8716-8521Wei-Chen Tu3https://orcid.org/0000-0003-1134-5859Yan-Kuin Su4https://orcid.org/0000-0001-9581-8486Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, Tainan, TaiwanEpileds Technologies, Incorporated, Tainan, TaiwanGreen Energy Technology Research Center, Department of Electrical Engineering, Kun Shan University, Yongkang, TaiwanDepartment of Electrical Engineering, Academy of Innovative Semiconductor and Sustainable Manufacturing, National Cheng Kung University, Tainan City, TaiwanInstitute of Microelectronics, Department of Electrical Engineering, Academy of Innovative Semiconductor and Sustainable Manufacturing, National Cheng-Kung University, Tainan, TaiwanThe efficiency of AlGaInP micro light-emitting diodes (micro-LEDs) was far weaker than that of GaN-based micro-LEDs in structure and performance. Consequently, there was an urgent demand to enhance their efficiency. In this study, a citric acid treatment strategy is proposed to improve the efficiency of red micro-LEDs, and the etching uniformity of different concentrations was first confirmed. We optimized the concentration of citric acid to 1:1 and modulated the wet etching time at 0, 30, 60, 90, and 120 s to treat the sidewalls of devices. Under an injection current density of 68 nA/cm<sup>2</sup>, the forward voltage (Vf) of micro-LEDs after soaking in citric acid ranged from 1.40 to 1.45 V. Compared with the sample operated at the forward voltage without citric acid sidewall treatment, AlGaInP micro-LEDs displayed significantly enhanced forward voltage. This indicates that citric acid effectively removed N-GaAs without damaging the electrical properties of the devices. Among all citric acid-treated micro-LEDs, the sample with a 60 s wet etching process showed the best improvement, with the light output power and external quantum efficiency (EQE) increased by 31.08&#x0025; and 5.4&#x0025;, respectively. Our proposed method to treat AlGaInP micro-LEDs presents promising opportunities for the future development of high-performance optoelectronics.https://ieeexplore.ieee.org/document/10415506/AlGaInPcitric acidforward voltagemicro light-emitting diodesidewall treatment
spellingShingle Zhen-Jin Wang
Xin-Liang Ye
Chih-Chiang Yang
Wei-Chen Tu
Yan-Kuin Su
Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid
IEEE Photonics Journal
AlGaInP
citric acid
forward voltage
micro light-emitting diode
sidewall treatment
title Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid
title_full Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid
title_fullStr Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid
title_full_unstemmed Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid
title_short Improved Performance of AlGaInP Red Micro Light-Emitting Diodes by Sidewall Treatments of Citric Acid
title_sort improved performance of algainp red micro light emitting diodes by sidewall treatments of citric acid
topic AlGaInP
citric acid
forward voltage
micro light-emitting diode
sidewall treatment
url https://ieeexplore.ieee.org/document/10415506/
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AT chihchiangyang improvedperformanceofalgainpredmicrolightemittingdiodesbysidewalltreatmentsofcitricacid
AT weichentu improvedperformanceofalgainpredmicrolightemittingdiodesbysidewalltreatmentsofcitricacid
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