Composition Determination from Strain Relaxation in 4D-STEM
Composition determination with high spatial resolution is crucial for device engineering of electronic and optoelectronic systems. While scanning transmission electron microscopy (STEM) can infer material composition from strain with high precision, multiple scattering effects (dynamic diffraction)...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
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| Series: | Applied Physics Express |
| Subjects: | |
| Online Access: | https://doi.org/10.35848/1882-0786/ade41b |
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